Method of forming conformal silicon carbide film by cyclic CVD

ABSTRACT

A method of forming, on a substrate having a recess pattern, a silicon carbide film having a reflective index of 2.3 or higher as measured at 633 nm, includes (i) supplying an organosilane precursor in a pulse to a reaction space where the substrate is placed, which precursor has a formula of RSiH 3  wherein R is a hydrocarbon-containing moiety including at least one unsaturated bond; (ii) continuously supplying a plasma-generating gas to the reaction space, which plasma-generating gas is selected from the group consisting of inert gases and hydride gases; (iii) continuously applying RF power to the reaction space to generate a plasma which excites the precursor; and (iv) repeating steps (i) through (iii), thereby forming a silicon carbide film on the substrate, which silicon carbide film has a reflective index of 2.3 or higher as measured at 633 nm.

BACKGROUND OF THE INVENTION Field of the Invention

The present invention generally relates to a method of forming a conformal silicon carbide film by chemical vapor deposition (CVD), particularly cyclic CVD.

Description of the Related Art

In semiconductor fabrication processes for, e.g., fabricating integrated circuit layers, a SiC film is often used due to its excellent properties such as high resistance to wet etching. When depositing a SiC film on a patterned substrate having a recess pattern, high conformality of the film is often required. In order to deposit a conformal SiC film, atomic layer deposition (ALD) utilizing a plasma or thermal energy may be a candidate deposition method since ALD is known as a process for depositing a conformal film. However, the principle of ALD is based on chemisorption of precursor molecules on a substrate, and since a precursor for depositing a SiC film contains carbon atoms, and carbon is known as an element which interferes with chemisorption of molecules, it is difficult to form a three-dimensionally controlled SiC film, wherein only partial formation of a skeleton is often developed in a film matrix. Although a SiC film can be formed by polymerization reaction using thermal decomposition of a precursor, high temperatures are required, and thus, that process cannot be applied to a process which requires low temperatures, such as those using a photoresist or the like. Further, although a conformal SiC film can be formed by combining deposition and etching, loading effects are observed, causing a problem in controllability of patterning. Accordingly, there is a demand for forming a highly conformal and uniform SiC film.

In this disclosure, a SiC film includes not only SiC films, but also SiCO films, SiCN films, SiCON films, or the like, depending on the process recipe, wherein the film names are abbreviations indicating merely the film types in a non-stoichiometric manner unless described otherwise.

Any discussion of problems and solutions in relation to the related art has been included in this disclosure solely for the purposes of providing a context for the present invention, and should not be taken as an admission that any or all of the discussion was known at the time the invention was made.

SUMMARY OF THE INVENTION

In some embodiments, in order to deposit a conformal SiC film, primary polymerization reaction is generated using weak radicals, thereby enabling deposition of a SiC film having high conformality on a substrate having a recess pattern, while maintaining the process temperature low. In some embodiments, a conformal film refers to a film having a conformality of 80% to 100% (typically about 90% or higher) wherein the “conformality” is determined by comparing film thickness deposited at some point (typically a middle point in a cross sectional view) on a sidewall or on a bottom of a recess to film thickness deposited on a flat surface just outside the recess.

In some embodiments, a silicon-containing precursor contains, per one silicon atom contained in its molecule, three Si—H bonds and a hydrocarbon group having a double bond or triple bond. In the above, when the precursor contains two or more silicon atoms in its molecule, the number of the Si—H bonds and the number of the hydrocarbon groups become double or more, proportionally according to the number of silicon atoms in its molecule. Accordingly, a SiC film having a high reflective index (RI) can be deposited.

In some embodiments, the polymerization reaction is performed at a temperature of 0° to 500° C. and at a RF power of 10 W to 500 W for a 300-mm wafer. In this disclosure, any indicated RF power for a 300-mm wafer can be converted to W/cm² (wattage per unit area of a wafer) which can apply to a wafer having a different diameter such as 200 mm or 450 mm.

In some embodiments, a gas required in a plasma atmosphere for generating polymerization is a single gas or a mixture of two or more gases selected from the group consisting of inert gases and hydride gases. The hydride gas is a hydrogen-suppling gas which typically contains no silicon or no metal element (but may contain carbon) since the hydride gas is for etchbacking a film for adjusting topology of the film, not for depositing a film.

In some embodiments, in order to improve step coverage of a SiC film, in addition to the deposition step, a plasma etchback step is conducted using a plasma generated using a hydride gas or a gas containing a hydride gas.

For purposes of summarizing aspects of the invention and the advantages achieved over the related art, certain objects and advantages of the invention are described in this disclosure. Of course, it is to be understood that not necessarily all such objects or advantages may be achieved in accordance with any particular embodiment of the invention. Thus, for example, those skilled in the art will recognize that the invention may be embodied or carried out in a manner that achieves or optimizes one advantage or group of advantages as taught herein without necessarily achieving other objects or advantages as may be taught or suggested herein.

Further aspects, features and advantages of this invention will become apparent from the detailed description which follows.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other features of this invention will now be described with reference to the drawings of preferred embodiments which are intended to illustrate and not to limit the invention. The drawings are greatly simplified for illustrative purposes and are not necessarily to scale.

FIG. 1A is a schematic representation of a gas-pulse plasma-enhanced CVD (PECVD) apparatus for depositing a dielectric film usable in an embodiment of the present invention.

FIG. 1B illustrates a schematic representation of a precursor supply system using a flow-pass system (FPS) usable in an embodiment of the present invention.

FIGS. 2 to 6 each show a schematic process sequence of gas-pulse PECVD in one cycle (primary cycle) in combination with a schematic process sequence of plasma etchback in one cycle (secondary cycle) according to an embodiment of the present invention wherein a cell in gray represents an ON state (darker gray represents higher intensity) whereas a cell in white represents an OFF state, and the width of each column does not represent duration of each process.

FIG. 7 is a flowchart illustrating steps of film formation according to an embodiment of the present invention.

DETAILED DESCRIPTION OF EMBODIMENTS

In this disclosure, “gas” may include vaporized solid and/or liquid and may be constituted by a single gas or a mixture of gases, depending on the context. Likewise, an article “a” or “an” refers to a species or a genus including multiple species, depending on the context. In this disclosure, a process gas introduced to a reaction chamber through a showerhead may be comprised of, consist essentially of, or consist of a silicon-containing precursor and an additive gas. The additive gas may include a plasma-generating gas (e.g., noble gas) and an etchback gas (e.g., hydride gas), which are excited or activated when RF power is applied to the additive gas. An inert gas may be fed to a reaction chamber as a carrier gas and/or a dilution gas. In some embodiments, no reactant gas for oxidizing, nitriding, or carbonizing the precursor is used, or alternatively in other embodiments, a reactant gas for oxidizing, nitriding, or carbonizing the precursor is used to dope a SiC film with O, N, or C. Further, in some embodiments, no reactant gas is used, and only noble gas (as a carrier gas and/or a dilution gas) is used as an additive gas. In some embodiments, only noble gas and hydride gas are used as an additive gas. The precursor and the additive gas can be introduced as a mixed gas or separately to a reaction space. The precursor can be introduced with a carrier gas such as a rare gas. A gas other than the process gas, i.e., a gas introduced without passing through the showerhead, may be used for, e.g., sealing the reaction space, which includes a seal gas such as a rare gas. In some embodiments, the term “precursor” refers generally to a compound that participates in the chemical reaction that produces another compound, and particularly to a compound that constitutes a film matrix or a main skeleton of a film, whereas the term “reactant” refers to a compound, other than precursors, that activates a precursor, modifies a precursor, or catalyzes a reaction of a precursor, wherein the reactant may provide an element (such as N, C) to a film matrix and become a part of the film matrix, when RF power is applied. The term “inert gas” refers to a gas that excites a precursor when RF power is applied, but unlike a reactant, it does not become a part of a film matrix.

In some embodiments, “film” refers to a layer continuously extending in a direction perpendicular to a thickness direction substantially without pinholes to cover an entire target or concerned surface, or simply a layer covering a target or concerned surface. In some embodiments, “layer” refers to a structure having a certain thickness formed on a surface or a synonym of film or a non-film structure. A film or layer may be constituted by a discrete single film or layer having certain characteristics or multiple films or layers, and a boundary between adjacent films or layers may or may not be clear and may be established based on physical, chemical, and/or any other characteristics, formation processes or sequence, and/or functions or purposes of the adjacent films or layers. Further, in this disclosure, any two numbers of a variable can constitute a workable range of the variable as the workable range can be determined based on routine work, and any ranges indicated may include or exclude the endpoints. Additionally, any values of variables indicated (regardless of whether they are indicated with “about” or not) may refer to precise values or approximate values and include equivalents, and may refer to average, median, representative, majority, etc. in some embodiments. Further, in this disclosure, the terms “constituted by” and “having” refer independently to “typically or broadly comprising,” “comprising,” “consisting essentially of,” or “consisting of” in some embodiments. In this disclosure, any defined meanings do not necessarily exclude ordinary and customary meanings in some embodiments.

In the present disclosure where conditions and/or structures are not specified, the skilled artisan in the art can readily provide such conditions and/or structures, in view of the present disclosure, as a matter of routine experimentation.

In all of the disclosed embodiments, any element used in an embodiment can be replaced with any elements equivalent thereto, including those explicitly, necessarily, or inherently disclosed herein, for the intended purposes. Further, the present invention can equally be applied to apparatuses and methods.

The embodiments will be explained with respect to preferred embodiments. However, the present invention is not limited to the preferred embodiments.

In some embodiments, a method of forming, on a substrate having a recess pattern, a silicon carbide film having a reflective index of 2.3 or higher as measured at 633 nm, comprising steps of: (i) supplying an organosilane precursor in a pulse to a reaction space where the substrate is placed, which precursor has a formula of RSiH₃ wherein R is a hydrocarbon-containing moiety including at least one unsaturated bond; (ii) continuously supplying a plasma-generating gas to the reaction space, which plasma-generating gas is selected from the group consisting of inert gases and hydride gases; (iii) continuously applying RF power to the reaction space to generate a plasma which excites the precursor; and (iv) repeating steps (i) through (iii), thereby forming a silicon carbide film on the substrate, which silicon carbide film has a reflective index (RI) of 2.3 or higher as measured at 633 nm (e.g., 2.3 to 2.9, preferably 2.5 to 2.8). When the RI of the film is in the range, etchback controllability of the film can be improved, and thus, by exposing the film to a hydrogen plasma, for example, a flat portion of the film (i.e., a portion deposited on a top surface of the substrate and/or a portion deposited at a bottom of the recess) can easily be etchbacked so as to improve conformality or step coverage of the film. In general, the higher the RI, the more the film is etchbacked by a hydrogen plasma or Ar plasma. Further, the film having a higher RI tends to contain more silicon atoms, whereas the film having a lower RI tends to contain more carbon atoms. A RI value representing the above RI may be a value measured in the flat portion.

When using the precursor which has a formula of RSH₃ wherein R is a hydrocarbon-containing moiety including at least one unsaturated bond, preferably a double bond or triple bonds, since the precursor has relatively fewer reactive groups and more Si—H bonds per silicon, reactivity of the precursor becomes higher, i.e., manifesting high reactivity even when being exposed to low energy plasma (low plasma power). As a result, not only conformality or step coverage, but also pattern loading property can be improved.

In the above, step (i) is intermittent, whereas steps (ii) and (iii) are continuous, and thus, this technology can be referred to as “gas-pulse plasma CVD.”

In this disclosure, a trench, via hole, and any other recess are referred to as a “recess.” In some embodiments, the pattern is constituted by recesses. In some embodiments, the recess has a width of 10 to 50 nm (typically 15 to 30 nm), a depth of 30 to 200 nm (typically 50 to 150 nm), and an aspect ratio of 3 to 20 (typically 3 to 10).

In steps (i) to (iv), which constitute a deposition step, a film which has relatively good step coverage can be deposited by supplying a relatively small amount of precursor (e.g., 0.001 g to 0.1 g per minute) which being exposed to a plasma of inert gas or a plasma of inert gas and hydrogen, wherein sputtering by the inert gas plasma or etching by the hydrogen plasma occur, thereby adjusting a thickness of a flat portion of the film depositing on a top surface of the substrate so as to control topology of the film. It should be noted that the hydride gas is used for backetching effect, and is not incorporated into a film (the composition of the film is not changed).

In some embodiments, the organosilane precursor is monoacetylsilane, monovinylsilane, or phenylsilane.

In some embodiments, in step (i), the organosilane precursor is supplied with a carrier gas, wherein the carrier gas is an inert gas.

In some embodiments, in step (i), the carrier gas is continuously supplied.

In some embodiments, in step (ii), the plasma-generating gas is an inert gas selected from the group consisting of noble gases and nitrogen gas.

In some embodiments, the plasma-generating gas further contains a hydride gas.

In some embodiments, the hydride gas is hydrogen gas.

In some embodiments, step (i) and step (iv) are conducted at a process temperature of 0° C. to 500° C.

In some embodiments, the process temperature is 100° C. or lower. When the process temperature is 100° C. or lower (e.g., 75° C. or lower) at which polymerization of precursor components takes place upon being adsorbed on a surface, the components sometimes form flowable liquid material instead of forming a bulk film. In that case, the flowable liquid material can be used as a gapfiller utilizing its surface tension, filling a trench or other recess.

In some embodiments, the method further comprises, after step (i) through step (iv): steps of (v) supplying an etchback gas for etchbacking a flat portion of the silicon carbide deposited in step (iv) without supplying the precursor or any other precursor to the reaction space; and (vi) while supplying the etchback gas in step (v), applying RF power to the reaction space, thereby etchbacking a flat portion of the silicon carbide film deposited on a top surface of the substrate and a bottom of the recess pattern. Steps (v) and (vi), which constitute an etchback step, may be conducted as necessary when conformality or topology of the deposited film is not satisfactory. Typically, when conducting the etchback step, the reaction space is purged before conducting the etchback step so that substantially no precursor or no component associated with or derived from the precursor is present in the reaction space. In the etchback step, no film is deposited. In some embodiments, the etchback step is conducted once after every several to several hundred cycles of the deposition step so that a topology of the film can be adjusted, wherein the deposition steps and the etchback step constitute a cycle of a film formation step, which can be repeated until a desired topology of the film can be achieved.

In some embodiments, the etchback gas is at least one gas selected from the group consisting of inert gases and hydride gases.

In some embodiments, the etchback gas is constituted by a noble gas and hydrogen gas.

In some embodiments, the etchback gas is supplied continuously throughout step (i) to step (vi).

In some embodiments, steps (i) to (vi) constitutes one cycle and are repeated until a desired thickness of the silicon carbide film is obtained.

In some embodiments, the method further comprises, after repeating steps (i) to (iii) in step (iv), steps of: (v′) supplying an inert gas (without supplying a hydride gas) to the reaction space without applying RF power in the absence of the precursor or any other precursor; and (vi′) while continuously supplying the inert gas (without supplying a hydride gas) to the reaction space, applying RF power to the reaction space, thereby further etchbacking the flat portion of the silicon carbide film. The difference between step (v) and step (v′) and the difference between step (vi) and step (vi″) are the absence of hydride gas in steps (v′) and (vi″). If the desired topology of the film does not require significant adjustment upon the deposition step, steps (v″) and (vi″) can be performed in place of steps (v) and (vi).

In some embodiments, the inert gas is continuously supplied throughout step (i) to (vi), wherein the inert gas is used as a carrier gas and a dilution gas in steps (i) and (ii) and as at least part of the etchback gas in steps (v′) and (vi′).

The embodiments will be explained with respect to embodiments illustrated in the drawings. However, the present invention is not limited thereto.

FIGS. 2 to 6 each show a schematic process sequence of gas-pulse PECVD in one cycle (primary cycle) in combination with a schematic process sequence of plasma etchback in one cycle (secondary cycle) according to an embodiment of the present invention wherein a cell in gray represents an ON state (darker gray represents higher intensity) whereas a cell in white represents an OFF state, and the width of each column does not represent duration of each process. The embodiments shown in FIGS. 2 to 6 are exemplary embodiments to which the present invention is not limited.

The process sequences illustrated in FIGS. 2 to 6 are comprised of a deposition step and an etchback step which is conducted to adjust topology and thickness of the deposited film, and thus, if the deposition step provides a desired topology/thickness of the deposited film, no etchback step is conducted. In the deposition step, a precursor is supplied intermittently or in pulses in “Depo,” while RF power is applied continuously to the reaction space in “Depo” and “Treatment 1,” wherein “Depo” and “Treatment 1” constitute one cycle of the deposition step. The cycle may be repeated several times to several hundred times until a desired thickness of the film is obtained. In “Treatment 1,” since no precursor is supplied to the reaction space, no film is deposited. Throughout the deposition step, an inert gas is supplied continuously to the reaction space as a plasma-generating gas. In the process sequences illustrated in FIGS. 2, 3 and 6, in the deposition step, a hydride gas is supplied continuously to the reaction space, whereas in the process sequences illustrated in FIGS. 4 and 5, no hydride gas is supplied. The hydride gas is used when, for example, a thickness of a portion of the film deposited on a top surface in which a trench is formed is topologically undesirably greater than a thickness of a portion of the film deposited on sidewalls of a trench, wherein the hydride gas is used as an etchback gas, and hydrogen gas radicals can etchback the portion of the film deposited on the top surface more than the portion of the film deposited on the sidewalls, thereby adjusting topology of the film. If the topology adjustment is not sufficient, after the deposition step is repeated several times to several hundred times, the etchback step is conducted.

In the process sequences illustrated in FIGS. 2 to 6, the etchback step is comprised of “Gas Flow” in which the reaction space is purged without applying RF power so as to remove the precursor and any other components associated with or derived from the precursor from the reaction space, and “Treatment 2” in which RF power is applied to the reaction space, wherein an inert gas is supplied continuously to the reaction space as a purge gas and a plasma-generating gas. The inert gas plasma generated by RF power etchbacks the portion of the film deposited on the top surface by sputtering effect. In the process sequences illustrated in FIGS. 2, 5 and 6, in the etchback step, a hydride gas is supplied continuously to the reaction space, whereas in the process sequences illustrated in FIGS. 3 and 4, no hydride gas is supplied. The hydride gas is used when, for example, the thickness of the portion of the film deposited on the top surface in which the trench is formed is topologically undesirably greater than the thickness of the portion of the film deposited on the sidewalls of the trench, wherein the hydride gas is used as an etchback gas, and hydrogen gas radicals can etchback the portion of the film deposited on the top surface more than the portion of the film deposited on the sidewalls, thereby adjusting topology of the film.

The process sequence illustrated in FIG. 6 is different from that illustrated in FIG. 2 in terms of intensity of RF power in “Treatment 1” and “Treatment 2,” wherein the process sequence illustrated in FIG. 6 uses higher RF power (e.g., 1.1 times to 3 times higher, or 1.5 times to 2.5 times higher) in “Treatment 1” and “Treatment 2” than those in FIG. 2 or than that in “Depo” in FIG. 6, so that more etchback effect is manifested (in the other sequences, RF power is constant through the film formation process).

The deposition step and the etchback step are repeated until a desired topology/thickness of the film can be obtained. FIG. 7 is a flowchart illustrating steps of film formation according to an embodiment of the present invention. In some embodiments, a thickness of the deposited film is 5 nm to 100 nm, typically 8 nm to 30 nm, depending on the intended purposes and applications.

As mentioned earlier, this process is a gas-pulse PECVD process, wherein polymerization reaction of the precursor takes place in a gas phase in the reaction space, not exclusively on a surface of the substrate as in a PEALD process. In gas-pulse PECVD, the reason that gas supply is pulsed as in PEALD is not self-limiting chemisorption of the precursor followed by surface reaction with an excited reactant gas to deposit a film as in PEALD, but is etchbacking a deposited film by a plasma while supplying no precursor to adjust topology of the film.

In some embodiments, “Depo” and “Treatment 1” of the deposition step, and “Gas Flow” and “Treatment 2” of the etchback step can be performed under conditions shown in Table 1 below.

TABLE 1 (numbers are approximate) Deposition step Etchback step Parameter Depo Treatment 1 Gas Flow Treatmanet-2 Precursor 0.001-0.1 g/min — — — Hydride gas 0~500 ccm (as H₂) 0~500 sccm (as H₂) 10~500 ccm (as H₂) 10~500 ccm (as H₂) Inert gas 100~4000 sccm 100~4000 sccm 100~4000 sccm 100~4000 sccm Carrier gas 500-4000 sccm 500-4000 sccm 500-4000 sccm 500-4000 sccm RF 50-500 W 100-1000 W — 100-1000 W Pressure 200-2000 Pa 200-2000 Pa 200-2000 Pa 200-2000 Pa Temperature 50-400° C. 50-400° C. 50-400° C. 50-400° C. Duration 0.1-3 s 0.1-10 s 3-10 s 1-10 s

In this disclosure, any indicated RF power for a 300-mm wafer can be converted to W/cm² (wattage per unit area of a wafer) which can apply to a wafer having a different diameter such as 200 mm or 450 mm.

In the process sequence described in this disclosure, the precursor may be supplied in a pulse using a carrier gas which is continuously supplied. This can be accomplished using a flow-pass system (FPS) wherein a carrier gas line is provided with a detour line having a precursor reservoir (bottle), and the main line and the detour line are switched, wherein when only a carrier gas is intended to be fed to a reaction chamber, the detour line is closed, whereas when both the carrier gas and a precursor gas are intended to be fed to the reaction chamber, the main line is closed and the carrier gas flows through the detour line and flows out from the bottle together with the precursor gas. In this way, the carrier gas can continuously flow into the reaction chamber, and can carry the precursor gas in pulses by switching the main line and the detour line. FIG. 1B illustrates a precursor supply system using a flow-pass system (FPS) according to an embodiment of the present invention (black valves indicate that the valves are closed). As shown in (a) in FIG. 1B, when feeding a precursor to a reaction chamber (not shown), first, a carrier gas such as Ar (or He) flows through a gas line with valves b and c, and then enters a bottle (reservoir) 30. The carrier gas flows out from the bottle 30 while carrying a precursor gas in an amount corresponding to a vapor pressure inside the bottle 30, and flows through a gas line with valves f and e, and is then fed to the reaction chamber together with the precursor. In the above, valves a and d are closed. When feeding only the carrier gas (noble gas) to the reaction chamber, as shown in (b) in FIG. 1B, the carrier gas flows through the gas line with the valve a while bypassing the bottle 30. In the above, valves b, c, d, e, and f are closed.

The precursor may be provided with the aid of a carrier gas. A plasma for deposition may be generated in situ, for example, in an atmosphere of inert gas that flows continuously throughout the deposition cycle. In other embodiments the plasma may be generated remotely and provided to the reaction chamber.

The process cycle can be performed using any suitable apparatus including an apparatus illustrated in FIG. 1A, for example. FIG. 1A is a schematic view of a gas-pulse PECVD apparatus, desirably in conjunction with controls programmed to conduct the sequences described below, usable in some embodiments of the present invention. In this figure, by providing a pair of electrically conductive flat-plate electrodes 4, 2 in parallel and facing each other in the interior 11 (reaction zone) of a reaction chamber 3, applying HRF power (13.56 MHz or 27 MHz) 20 to one side, and electrically grounding the other side 12, a plasma is excited between the electrodes. A temperature regulator is provided in a lower stage 2 (the lower electrode), and a temperature of a substrate 1 placed thereon is kept constant at a given temperature. The upper electrode 4 serves as a shower plate as well, and reactant gas (and noble gas) and precursor gas are introduced into the reaction chamber 3 through a gas line 21 and a gas line 22, respectively, and through the shower plate 4. Additionally, in the reaction chamber 3, a circular duct 13 with an exhaust line 7 is provided, through which gas in the interior 11 of the reaction chamber 3 is exhausted. Additionally, a dilution gas is introduced into the reaction chamber 3 through a gas line 23. Further, a transfer chamber 5 disposed below the reaction chamber 3 is provided with a seal gas line 24 to introduce seal gas into the interior 11 of the reaction chamber 3 via the interior 16 (transfer zone) of the transfer chamber 5 wherein a separation plate 14 for separating the reaction zone and the transfer zone is provided (a gate valve through which a wafer is transferred into or from the transfer chamber 5 is omitted from this figure). The transfer chamber is also provided with an exhaust line 6. In some embodiments, the deposition of multi-element film and surface treatment are performed in the same reaction space, so that all the steps can continuously be conducted without exposing the substrate to air or other oxygen-containing atmosphere. In some embodiments, a remote plasma unit can be used for exciting a gas.

In some embodiments, in the apparatus depicted in FIG. 1A, the system of switching flow of an inactive gas and flow of a precursor gas illustrated in FIG. 1B (described earlier) can be used to introduce the precursor gas in pulses without substantially fluctuating pressure of the reaction chamber.

In some embodiments, a dual chamber reactor (two sections or compartments for processing wafers disposed close to each other) can be used, wherein a reactant gas and a noble gas can be supplied through a shared line whereas a precursor gas is supplied through unshared lines.

A skilled artisan will appreciate that the apparatus includes one or more controller(s) (not shown) programmed or otherwise configured to cause the deposition and reactor cleaning processes described elsewhere herein to be conducted. The controller(s) are communicated with the various power sources, heating systems, pumps, robotics and gas flow controllers or valves of the reactor, as will be appreciated by the skilled artisan.

The present invention is further explained with reference to working examples below. However, the examples are not intended to limit the present invention. In the examples where conditions and/or structures are not specified, the skilled artisan in the art can readily provide such conditions and/or structures, in view of the present disclosure, as a matter of routine experimentation. Also, the numbers applied in the specific examples can be modified by a range of at least ±50% in some embodiments, and the numbers are approximate.

EXAMPLES

A silicon carbide film was formed on a 300-mm substrate having a patterned surface having an aspect ratio of about 3 and an opening width of about 50 nm under general conditions where the flow rate of carrier gas (Ar) was 2 slm, the process pressure was 400 Pa, the temperature was 350° C., RF power was 100 W, the duration of “Depo” (see FIGS. 2-6) was 0.1 seconds, the duration of “Treatment 1” (see FIGS. 2-6) was 1 second, and the number of deposition cycles was 80, with the specific conditions shown in Table 2 below (the deposition step was conducted without conducting the etchback step) and the gas-pulse PECVD apparatus illustrated in FIG. 1A and a gas supply system (FPS) illustrated in FIG. 1B. The thickness of film (deposited on a top surface) was 10 nm for evaluating film properties.

TABLE 2 (numbers are approximate) # of # of S—H Double bonds bonds Inert gas Precursor per Si per Si H₂ [slm] (Ar) [slm] C. Ex. 1 Hexamethyldisilane 3 0 0.1 0.5 C. Ex. 2 Diethyl silane 2 0 0.1 0.5 Ex. 1 Monoacetyl silane 3 1 0.1 0.5 Ex. 2 Monovinyl silane 3 1 0.1 0.5 Ex. 3 Monovinyl silane 3 1 0 0.5 Ex. 4 Phenylsilane 3 3 0.1 0.5 Ex. 5 Phenylsilane 3 3 0 0.5

The properties of the films were evaluated, and the results are shown in Table 3 below.

TABLE 3 (numbers are approximate) Side Pattern GPC Coverage Loading 100:1 DHF [nm/cycle] [%] [%] WERR of TOX RI@633 nm C. Ex. 1 0.02 80 82 <0.1 2.1 C. Ex. 2 0.01 75 77 0.1 1.8 Ex. 1 0.03 88 88 <0.1 2.5 Ex. 2 0.03 94 91 <0.1 2.5 Ex. 3 0.04 81 92 <0.1 2.5 Ex. 4 0.01 90 90 <0.1 2.3 Ex. 5 0.02 80 88 <0.1 2.3

In the above, the term “Side Coverage” refers to a ratio (%) of thickness of film deposited on sidewalls of a trench to thickness of film deposited on a top surface of the substrate. The term “Pattern Loading” refers to a ratio (%) of thickness of film deposited on sidewalls of a trench in a dense region where a density of trenches was high, to thickness of film deposited on sidewalls of a trench in an isolation region where a density of trenches was low. The term “100:1 DHF WERR of TOX” refers to a ratio of wet etch rate of film deposited on a top surface of the substrate when being submerged in a diluted HF solution (1%) at room temperature for one minute, to wet etch rate of a thermal oxide film under the same wet etching conditions. The term “GPC (nm/cycle)” refers to growth rate per cycle of film deposited on the top surface of the substrate. The term “RI@633 nm” refers to reflective index (at a wavelength of 633 nm) of film deposited on the top surface of the substrate.

As shown in Table 3, when the precursor having a formula of RSiH₃ wherein R is a hydrocarbon-containing moiety including at least one unsaturated bond was used to deposit a silicon carbide film by gas-pulse PECVD in each of Ex. 1 to Ex. 5, the film had a RI of 2.3 or higher, and all of the properties (side coverage, patter loading, and wet etch resistance) of the film were excellent. In contrast, when the precursor, other than the above precursor, was used to deposit a silicon carbide film by gas-pulse PECVD in each of C. Ex. 1 and C. Ex. 2 (comparative examples), the film had a RI of less than 2.3, and the overall properties were unsatisfactory.

It will be understood by those of skill in the art that numerous and various modifications can be made without departing from the spirit of the present invention. Therefore, it should be clearly understood that the forms of the present invention are illustrative only and are not intended to limit the scope of the present invention. 

We claim:
 1. A method of forming, on a substrate having a recess pattern, a silicon carbide film having a reflective index of 2.3 or higher as measured at 633 nm, comprising steps of: (i) supplying an organosilane precursor in a pulse to a reaction space where the substrate is placed, which precursor has a formula of RSiH₃ wherein R is a hydrocarbon-containing moiety including at least one unsaturated bond, provided that the precursor is not phenyl silane; (ii) continuously supplying a plasma-generating gas without a hydride gas to the reaction space, which plasma-generating gas is an inert gas; (iii) continuously applying RF power to the reaction space to generate a plasma which excites the precursor; and (iv) repeating steps (i) through (iii), thereby forming a silicon carbide film on the substrate, which silicon carbide film has a reflective index of 2.3 or higher as measured at 633 nm.
 2. The method according to claim 1, wherein the organosilane precursor is monoacetylsilane or monovinylsilane.
 3. The method according to claim 1, wherein in step (i), the organosilane precursor is supplied with a carrier gas, wherein the carrier gas is an inert gas.
 4. The method according to claim 3, wherein in step (i), the carrier gas is continuously supplied.
 5. The method according to claim 1, wherein in step (ii), the plasma-generating gas is an inert gas selected from the group consisting of noble gases and nitrogen gas.
 6. The method according to claim 1, wherein step (i) and step (iv) are conducted at a process temperature of 0° C. to 500° C.
 7. The method according to claim 6, wherein the process temperature is 100° C. or lower.
 8. The method according to claim 1, further comprising, after completion of deposition cycles constituted by step (i) through step (iv), steps of, as a post-deposition treatment: (v) supplying an etchback gas for etchbacking a flat portion of the silicon carbide deposited in step (iv) without supplying the precursor to the reaction space; and (vi) while supplying the etchback gas in step (v), applying RF power to the reaction space, thereby etchbacking a flat portion of the silicon carbide film deposited on a top surface of the substrate and a bottom of the recess pattern.
 9. The method according to claim 8, wherein the etchback gas is at least one gas selected from the group consisting of inert gases and hydride gases.
 10. The method according to claim 9, wherein the etchback gas is constituted by a noble gas and hydrogen gas.
 11. The method according to claim 8, wherein the etchback gas is supplied continuously throughout step (i) to step (vi).
 12. The method according to claim 8, wherein steps (i) to (vi) constitutes one cycle and are repeated until a desired thickness of the silicon carbide film is obtained.
 13. The method according to claim 12, further comprising, after repeating steps (i) to (iii) in step (iv): (v′) supplying an inert gas to the reaction space without applying RF power; and (vi′) while continuously supplying the inert gas to the reaction space, applying RF power to the reaction space, thereby further etchbacking the flat portion of the silicon carbide film.
 14. The method according to claim 13, wherein the inert gas is continuously supplied throughout step (i) to (vi), wherein the inert gas is used as a carrier gas and a dilution gas in steps (i) and (ii) and as at least part of the etchback gas in steps (v′) and (vi′). 